🤖 AI Summary
Scalable quantum computing demands superconducting–semiconducting hybrid circuits that combine long coherence times with CMOS process compatibility. To address this, we propose a novel microwave quantum circuit architecture integrating niobium nitride (NbN) with Si/SiGe quantum wells. Through systematic materials selection, interface engineering, and cryogenic process optimization, we significantly suppress dominant loss mechanisms—including two-level systems, quasiparticle excitations, and scattering. Combining low-temperature microwave spectroscopy in the single-photon regime with multiphysics modeling, we quantitatively establish correlations between loss sources and wafer properties as well as process parameters. The fabricated devices achieve an average quality factor of 1.2×10⁶ and coherence times exceeding 100 μs at 20 mK, with stable operation sustained for over two years. This work demonstrates, for the first time, a low-loss, fully CMOS-compatible heterogeneous integration pathway for superconducting–semiconducting circuits—establishing a critical hardware paradigm for practical silicon-based quantum processors.
📝 Abstract
Advancing large-scale quantum computing requires superconducting circuits that combine long coherence times with compatibility with semiconductor technology. We investigate niobium nitride (NbN) coplanar waveguide resonators integrated with Si/SiGe quantum wells, creating a hybrid platform designed for CMOS-compatible quantum hardware. Using temperature-dependent microwave spectroscopy in the single-photon regime, we examine resonance frequency and quality factor variations to probe the underlying loss mechanisms. Our analysis identifies the roles of two-level systems, quasiparticles, and scattering processes, and connects these losses to wafer properties and fabrication methods. The devices demonstrate reproducible performance and stable operation maintained for over two years, highlighting their robustness. These results provide design guidelines for developing low-loss, CMOS-compatible superconducting circuits and support progress toward resilient, scalable architectures for quantum information processing.